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Original Articles

Pb(ZrxTi1-x)O3 films produced by sol-gel proceslng: Thin film growth and properties

, , , &
Pages 13-18 | Received 09 Aug 1993, Published online: 25 Feb 2011
 

Abstract

PZT thin films of various compositions have been grown by sol-gel processing. After firing and annealing at various temperatures and heating rates, the crystallinity is checked by X-ray diffraction, ferroelectricity by observation of hysteresis loop, stoichiometry by EMA and surface morphology by SEM. A study by XPS is undergone. Ferroelectric domains are present and visualized with TEM.

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