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Abstract
Applications of analytical electron microscopy (TEM-EDXS) in investigations of ceramic ferroelectric materials are described and discussed. Emphasis is placed on various PZT and PLZT materials. Mixed oxide and sol-gel derived loose powder, bulk ceramic material and sol-gel derived ferroclectric thin films on various substrates were analyzed and the degree of homogeneity was determined. The influence of TEM sample preparation and the operating conditions of the transmission electron microscope on deterioration of crystal structure, deviation of chemical composition and the formation of a contamination layer are described and discussed.