Preparation of La_1−xSr_xCoO₃ electrodes for ferroelectric thin films by rf magnetron sputtering

Hiroshj Masumoto Laboratoire de Céramique, Départernent des Matériaux, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland

Stephane Hiboux Laboratoire de Céramique, Départernent des Matériaux, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland

Paul Muralt Laboratoire de Céramique, Départernent des Matériaux, École Polytechnique Fédérale de Lausanne, Lausanne, 1015, Switzerland

Abstract

(100)-oriented stoichiometric LSCO films were deposited on Pt/TiO₂/SiO₂/Si, TiO₂/Pt/TiO₂/SiO₂/Si and Si substrates with rf magnetron sputtering using a single self fabricated oxide target. Best conductive LSCO film was obtained at 600°C, yielding a specific resistivity of 90 μΩCm. The PZT film deposited on the LSCO(100) electrode oriented to (100) or (001). Maximum value of d₃₃ coefficient was 73.5 pm/V.

Keywords:

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Preparation of La_1−xSr_xCoO₃ electrodes for ferroelectric thin films by rf magnetron sputtering

Information for

Open access

Opportunities

Help and information

Preparation of La1−xSrxCoO3 electrodes for ferroelectric thin films by rf magnetron sputtering

Abstract

Reprints and Corporate Permissions

Academic Permissions

Related research

To cite this article:

Download citation

Information for

Open access

Opportunities

Help and information

Keep up to date

Your download is now in progress and you may close this window

Login or register to access this feature

Preparation of La_1−xSr_xCoO₃ electrodes for ferroelectric thin films by rf magnetron sputtering