A run-to-run controller for product surface quality improvement

Abstract

In semiconductor manufacturing, the surface quality of silicon wafers has a significant impact on the subsequent processes that produce devices using the wafers as a component. The surface quality of a wafer is characterised by a two-dimensional (2-D) data structure: the geometric requirement for the wafer surface is smooth and flat and the thickness should fall within certain specification limits. Therefore, both low deviation and high uniformity are desirable for control over the wafer quality. In this work, we develop a run-to-run control algorithm for improving wafer quality. Considering the unique 2-D data structure, we first construct a model that encompasses the spatial correlation of the observations on the wafer surface to link the wafer quality with the process variables, and subsequently develop a recursive algorithm to generate optimal set points for the controllable factors. More specifically, a Gaussian-Kriging model is used to characterise the spatial dependence of the thickness measures of the wafer and a recursive least square method is employed to update the estimates of the model parameters. The performance of the new controller is studied via simulation and compared with existing controllers, which demonstrates that the newly proposed controller can effectively reduce the surface variations of the silicon wafers.

Keywords:

• Kriging
• process modelling
• run-to-run control
• silicon wafer

Acknowledgement

We greatly thank the editor and the anonymous referees for their valuable comments, which have helped improve this work greatly.