Silicon Crystal Termination—An Application of ANOM for Percent Defective Data

Abstract

The late Dr. Ellis R. Ott has erected his own memorial by providing quality control practitioners with a useful tool for the direct graphical comparison of means. This paper discusses the application of his technique to the first processing step in semiconductor manufacturing. In particular, a simple dichotomous parameter is selected for analysis to demonstrate that significant gains can be realized when this appealing statistical procedure is coupled with quality team involvement.

• Analysis of Means
• Attribute Data
• Crystal Growing
• Termination

Additional information

Notes on contributors

Lowell H. Tomlinson

Mr. Tomlinson is a Senior Engineer in the Reliability and Quality Control Engineering Department. He is a Senior Member of ASQC.

Robert J. Lavigna

Mr. Lavigna is a Senior Engineer in the Semiconductor Material Engineering Department and was formerly the Silicon Growing Shop Section Chief.