Sputtering models—A synoptic view

Abstract

This article surveys the present state of sputtering theories. Similarities and differences between the statistical theories and atom ejection simulations are discussed in detail. The limitations of both approaches are considered, and the different viewpoints are contrasted. Some computer simulation model results for atom ejection from pure metal single crystals are summarized. The implications of these results, and their contribution toward the future development of sputtering theory is indicated.