Ion implantation in glasses and concomitant effects

Abstract

Various ions with energies of 30-400 keV, doses of 6.2-10^,5-6.2'10¹⁶ ion/cm², and current densities of 1-10 μA/cm² were implanted in silicate glasses. Ion bombardment markedly altered the near-surface glass layer. The contributions of complicated physical-chemical processes to the resultant modification of the structure and properties of the glasses, in particular the contribution of chemical effects were determined. Antireflection in the IR range and long-range interaction were observed in ion-implanted glasses.