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Original Articles

Dark-field electron microscopy of dissociated dislocations and surface steps in silicon using forbidden reflections

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Pages 139-153 | Received 19 Aug 1982, Accepted 26 Jan 1983, Published online: 13 Sep 2006
 

Abstract

Abstract

Dissociated dislocations in (111) foils of silicon have been imaged in the forbidden reflection of type ⅓(422). Largo contrast effects are observed at stacking faults, and thickness fringes corresponding to changes of thickness of a repeat unit (3d111) are revealed. The partial dislocations bounding the fault are observed as very narrow images. The contrast effects are explained in terms of kinematical theory, and the potential applications of this technique are discussed.

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