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Radiation Effects Volume 58, 1981 - Issue 6

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Original Articles

Directional distribution of burgers vectors op dislocation loops in ion-implanted silicon

F. F. Komarov Institute of Applied Physical Problems, Belorussian university, Minsk

V. S. Solovev Institute of Applied Physical Problems, Belorussian university, Minsk

S. Yu. Skiryaev Institute of Applied Physical Problems, Belorussian university, Minsk

Pages 177-181 | Received 28 Jul 1981, Published online: 19 Aug 2006

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https://doi.org/10.1080/01422448108226558

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Abstract

The possible directional distributions of Burgers vectors of perfect dislocation loops and dipoles formed in the silicon single crystals after ion implantation and annealing have been studied.

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