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Heat Transfer Engineering Volume 27, 2006 - Issue 4
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Original Articles

Two-Phase Microfluidics for Semiconductor Circuits and Fuel Cells

Carlos H. Hidrovo Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Theresa A. Kramer Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Evelyn N. Wang Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Sébastien Vigneron Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Julie E. Steinbrenner Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Jae-Mo Koo Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Fu-Min Wang Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
David W. Fogg Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Roger D. Flynn Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Eon Soo Lee Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Ching-Hsiang Cheng Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
Thomas W. Kenny Mechanical Engineering Department, Stanford University, Stanford, California, USA
,
John K. Eaton Mechanical Engineering Department, Stanford University, Stanford, California, USA
&
Kenneth E. Goodson Mechanical Engineering Department, Stanford University, Stanford, California, USA
 show all
Pages 53-63 | Published online: 18 Aug 2006
 
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Industrial trends are presenting major challenges and opportunities for research on two-phase flows in microchannels. Semiconductor companies are developing 3D circuits for which multilevel microfluidic cooling is important. Gas delivery microchannels are promising for PEM fuel cells in portable electronics. However, data and modeling are needed for flow regime stability, liquid entrainment/clogging, and bubble inception/departure in complex 2D and 3D geometries. This paper provides an overview of the Stanford two-phase microfluidics program, with a focus on recent experimental and theoretical progress. Microfabrication technologies are used to distribute heaters, thermometers, pressure sensors, and liquid injection ports along the flow path. Liquid PIV quantifies forces on bubbles, and fluorescence imaging detects flow shapes and liquid volume fraction. Separated flow models account for conjugate conduction, liquid injection, evaporation, and a variety of flow regimes. This work benefits strongly from interactions with semiconductor and fuel cell companies seeking validated models for product design.

Acknowledgments

The authors would like to thank our sponsors, Honda R&D Co. Ltd., Intel Corporation, and DARPA, through their 3DIC intiative, not only for their support but also for their input, feedback, and insight.

Work was performed in part at the Stanford Nanofabrication Facility (a member of the National Nanofabrication Users' Network), which is supported by the National Science Foundation under grant ECS-9731293, its lab members, and the industrial members of the Stanford Center for Integrated Systems.

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