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Abstract
A new, highly selective silicon-based membrane was developed by pyrolyzing a thermosetting silicon resin precursor in two steps. The pyrolysis step was performed under an inert gas in the range of 800 to 950°C. The activation step was conducted at the same temperature as the first step. Oxygen content in the activation gas was located between 0.5 and 1.0%. The crosslinking density and the matrix structure of the polymeric precursor were important factors for the permeable characteristics of the resulting pyrolysis membrane. The average selectivity was 5 to 10 times those of a pyrolysis membrane from silicon rubber. Additives in the precursor had significant effects on toughness and stability of the resulting membrane. By varying the additive content in the precursor, silicon-based pyrolysis membranes with different stabilities in air were obtained.