ABSTRACT
Heat transfer at microscale plays an important role in microtechnology applications. First, this paper is concerned with the numerical solution of a two-dimensional (2D) heat transfer equation at microscale through a second-order alternating direction implicit (ADI) method. By the discrete energy method, it is shown that the ADI solution converges to the exact solution with a convergence order of in L2-norm. Second, the ADI method is generalized to numerically solve the three-dimensional (3D) problem, and provides numerical solutions of order two in both time and space. Finally, numerical results testify the temporal and spatial accuracy of the ADI method.
Acknowledgments
Authors are deeply grateful to two anonymous referees, editor, and Principal Editor Prof. Zuhair Nashed for their insightful comments and helpful suggestions, which have greatly improved this article.