Basic Parameters of Coplanar Discharge Ozone Generator

ABSTRACT

Coplanar discharge is a new type of barrier discharge, and has some advantages for high-concentration ozone generation. In this article, basic parameters of coplanar discharge are clarified by experimental and theoretical approaches. Coplanar electrodes consist of many pairs of line electrodes printed on a glass plane, and are covered with dielectric layer. The discharge properties, ozone diffusion process, and surface reaction are discussed. Finally, the scaling rule of a coplanar discharge ozone generator is demonstrated by fabrication of a 3 kg/h ozone generator.

Keywords:

• Ozone
• Coplanar Discharge
• Ozone Generator Design
• High-Concentration Ozone Generator

ACKNOWLEDGMENTS

The authors thank Dr. V. I. Gibalov, Moscow University, and Prof. G. J. Pietsch, Aachen University of Technology, for their advice on the modeling of ozone generation. They are grateful to Prof. H. Itoh, Chiba Institute of Technology, for informing them about many findings concerning ozone diffusion and surface reactions. The authors also to thank K. Kanemaru, Dr. K. Terai, and Dr. K. Suzuki of Toshiba Corporation for their support concerning this development.