Abstract
In many fields of industrial application the usage of ozone is a question of economics. In order to improve the efficiency of especially air-fed ozone generators, fundamental research work on modelling of microdischarges, the chemical reaction scheme, and extensive experimental investigations have been undertaken. By proper choice of the operation conditions like pressure, gap width, and cooling conditions, the efficiency can be improved considerably. The reaction temperature in the process volume and the concentration of nitrogen oxides are the main factors influencing the ozone yield.