Analysis of Factors for Improving Functionality of Tin Oxide Gas Sensor

ABSTRACT

The proposed work discusses different parameters which are considered to improve the performance of a tin oxide-based thin film gas sensor. This includes analysing and deducing suitable catalytic additives to enhance the performance of the sensor in terms of selectivity and sensitivity. Chemical sensitization and electronic sensitization are performed to improve the rate of response of the sensor.

Keywords:

• Catalysis
• Grain size
• Porosity
• Sensitivity

Acknowledgements

The authors acknowledge the facilities in the Center of Excellence in Nanoelectronics at IISc.

Additional information

Funding

The authors are thankful to the Department of Science and Technology, Ministry Of Information and Communication Technology [grant number IDP/MED/2012/6] which has provided the funds for setting up this facility at IISc. They also thank B-Smart for funding through sponsored project.

Notes on contributors

Guruviah Velmathi

G. Velmathi is currently working as professor in the Department of Electronics and Communication Engineering in VCET, Madurai. She received the PhD from Indian institute of Science in the field of MEMS, Gas Sensor and VLSI design. She has published many national and international conference papers. She has two patents and few awards like best teacher award in her credit. She has two ongoing projects funded by DST for the benefit of disabled elderly people.

E-mail: [email protected]

Sanganeni Mohan

S. Mohan is a former chairman of the Department of Instrumentation and Applied Physics, IISc. He is now working as a visiting faculty in Centre for Nano Science and Engineering (CeNSE) Indian Institute of Science. He has 23 completed and three ongoing projects of worth 300 crores in his credit. His area of research includes ultrathin oxide films for high k dielectrics for gate and DRAM applications, MEMS gas sensors and shape memory microactuators. He has more than 200 publications in peer reviewed journals in his credit. He has won many awards which includes the latest excellent Academic Award from the prime minister.

E-mail: [email protected]

Rabinder Henry

Rabinder Henry is a chief technology officer at Jampot Photonics. He was an associate dean-HOD and professor of School of Interdisciplinary Science & Technology at IIT from 2006 to 2012. He holds MSc degrees in RF and microwave engineering, photonics and medical systems from Technical University of Dresden and University of Magdeburg. He has worked with Fraunhofer Institute for Photonics Microsystems, Institute for Electron Devices and Integrated Circuits, Dresden and Helmholtz Zentrum Rossendorf.

E-mail: [email protected]