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Review

Effects of anodisation parameters on thin film properties: a review

, , , , , & show all
Pages 699-711 | Received 23 Dec 2015, Accepted 20 May 2016, Published online: 02 Jun 2016
 

Abstract

Electrochemical anodisation is a well-received method in the complementary metal-oxide-semiconductor field as it is advantageous; best performed at room temperature which translates into being more affordable and a simple alternative to form nano-structured oxide films for different metals. The quintessential parameters involved allow numerous formations of metal oxide films according to desired morphology and thickness. Therefore, this paper aims to review the effects of anodising parameters such as applied voltage, concentration, temperature, time, current density and post-anodisation annealing among them.

Acknowledgements

The authors would like to acknowledge the financial support from Universiti Malaya Research Grant [RP024A-13AET] and Ministry of Science, Technology and Innovation through ScienceFund [03-01-03-SF1083].

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