Influence of Mo content on properties of Ti–Al–Mo–N films

ABSTRACT

Ti–Al–Mo–N composite films with different molybdenum content were deposited by reactive magnetron sputtering. The results showed that the films consisted of fcc-(Ti, Al, Mo) N substitutional solid solution within 8.2 at.-% Mo. The films consisted of two phases which were fcc-(Ti, Al, Mo) N substitutional solid solution and fcc-Mo₂N at 27.7–49.4 at.-% Mo. The hardness increased slowly at 0–27.7 at.-% Mo and then increased rapidly at above 27.7 at.-% Mo. A ball-on-disc dry sliding test was conducted on films deposited on stainless-steel substrates. The friction coefficient quickly decreased within 8.2 at.-% Mo and then gently declined at 8.2–49.4 at.-% Mo. The value of wear rate remained quite constant for compositions in the range 0–34.3 at.-% Mo and then dropped quickly at 34.3–49.4 at.-% Mo. The addition of Mo content effectively improved the hardness and tribological properties of the films.

KEYWORDS:

• Ti–Al–Mo–N films
• magnetron sputtering
• microstructure
• mechanical properties
• tribological properties

Disclosure statement

No potential conflict of interest was reported by the author(s).

Additional information

Funding

We acknowledge the financial support from the National Key R&D Program of China [No. 2016YFB1100103] and the National Natural Science Foundation of China [51801081, 51574131].