Noncontact acousto-electromagnetic measurement of mechanical resonance in electronic systems

Abstract

In this paper, we present a noncontact, acousto-electromagnetic approach for the measurement of mechanical resonance. An acoustic wave is used to vibrate the device under test (DUT), and the vibration is then detected by an active radio frequency sensor. Because both the vibration and detection are performed in a noncontact way and therefore have no external impact on the DUT’s mechanical resonance, the DUT’s natural zero-loaded resonance frequency can thus be precisely measured.

Acknowledgment

This work is supported by the NSFC under grants 61,071,063, 61,102,003, and 61,131,002, ZJNSF under grants Y1110270, and the National Key Laboratory Foundation of China under grant 9140A21060211HT0511.