Convergent-beam electron diffraction from AlGaAs/GaAs single quantum wells

Abstract

The large-angle convergent-beam electron diffraction technique has been used to obtain 200 rocking curves from a l500 Å Al,_0·4 Ga_0·6 As/30Å GaAs/3500Å Al_0·4 Ga_0·6 As sample observed in plan view. It is demonstrated that the rocking curves are sensitive to the presence of the GaAs layer and are in good agreement with simulations calculated from a simple kinematical approach. It is shown that both the layer thickness and depth in the foil may be examined and that GaAs layer thicknesses less than 10 Å in the 5000 Å foil may be detectable.