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Presented is a high-resolution scanning electron microscopy study of the mechanical behaviour of GaAs/AlAs superlattices that have been deformed through microindentation. Transverse cleavage through the indentation sites reveals the pattern of the deformed multilayers, showing in particular debonding between the GaAs and AlAs layers, regions of compressive strains of up to 30% and substantial slip on the {111} planes.
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