Application of Reproducing the Kernel Particle Method on the Simulation of the Membrane of a Capacitive Micromachined Microphone in Viscothermal Air

Abstract

Simulation of the microphone membrane determines whether highest sensitivity is attainable when it comes to the field of microelectromechanical system (MEMS) microphone design. The reproducing kernel particle method is introduced to simulate a MEMS microphone membrane in viscothermal fluid. The result from a numerical axisymmetry model of 1 mm radius and 10 μm thickness membrane with a fixed boundary condition upon 1 mm thickness viscothermal air is identical to that from the theoretical model. Finally, a MEMS axisymmetry model of a 180 μm radius and 10 μm thickness membrane upon 10 μm thickness viscothermal air is simulated here.

Acknowledgments

This research was supported in part by the National Science Council of Taiwan, R.O.C. under grant NSC 97-2221-E-022-008-MY2.