Finite-Volume Method for Structural Analysis of RF MEMS Devices Using the Theory of Plates

Abstract

Radio-frequency microelectromechanical systems (RF MEMS) have wide applicability in contact actuators and capacitive switches. In these devices, the membrane deforms under nonlinearly varying electrostatic actuation. It is advantageous to adopt a single comprehensive numerical framework to model these coupled systems. Frequently, the membranes are very thin with aspect ratios as high as 1:500. We model these membranes using the theory of plates and make use of the Mindlin-Reissner plate theory. In this article, we describe a cell-centered finite-volume approach to discretize the governing equations. Transverse deflection and bending moment distributions are first described for canonical test problems, verifying the accuracy of the method. Results are then presented for a fixed-fixed MEMS device, modeled as a thin plate, under electrostatic actuation.

Acknowledgments

Support of the authors by Purdue's PRISM Center under funding from U.S. Department of Energy Award Number DE-FC52-08NA28617 is gratefully acknowledged. Support of Shankhadeep Das under Purdue's Frederick N. Andrews Fellowship is also acknowledged.