In₂O₃- and SnO₂-based Ozone Sensors: Design and Characterization

ABSTRACT

This article describes in detail the SnO₂ and In₂O₃ metal oxides as materials for designing solid state conductometric ozone sensors. The main focus of this article is on the description of the SnO₂ and In₂O₃ films' structural parameters important for gas sensor design and on the establishment of the main regularities of the film parameters influence on the sensor characteristics. Advantages and disadvantages of approaches used for optimization of ozone sensor parameters are also analyzed_. In particular, surface modification, bulk doping of SnO₂ and In₂O₃, and the use of 1D structures and hybrid materials are considered. The main factors, controlling parameters of SnO₂- and In₂O₃-based ozone sensors, are determined, and recommendations for the process of the SnO₂ and In₂O₃ films deposition, facilitating the search of the film parameters and the fabrication technologies that optimize the ozone sensor performance, are formulated.

KEYWORDS:

• Metal oxides
• SnO₂
• In₂O₃
• thin film
• deposition
• characterization
• gas sensor
• ozone
• operation
• optimization

Funding

This work was supported by the Ministry of Science, ICT and Future Planning (MSIP) of the Republic of Korea, and by the Bio & Medical Technology Development Program of the National Research Foundation of Korea funded by the MSIP (No. NRF-2015M3A9B8032703), and partly by State Program of Republic of Moldova, project 15.817.02.29F.