Abstract
Monte Carlo (MC) simulations have been used to study the low-energy channeling of 10B and 11B ions along the [100] axis in Si crystal. MC simulations show that the critical angle ΨC ≈ 15.3(keV/E)1/2 (in degrees) for the channeling of isotopic 10B ions and ΨC=14.5(keV/E)1/2 (in degrees) for the channeling of isotopic 11B ions, where E is the incident energy. This means that (ΨC for 10B ions/ΨC for 11B ions)≈ (15.3/14.5)≈ (11/10)1/2.
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Acknowledgements
This study was supported by the Knowledge Innovation Project of Chinese Academy of Sciences under grant no. KJCX2-SW-N10 and by the National Basic Research Program of China (973 Program) 2010CB832903.