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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 166, 2011 - Issue 11
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Original Articles

Isotopic mass effects for low-energy channeling in a silicon crystal

, , , &
Pages 861-865 | Received 02 Apr 2010, Accepted 11 Jun 2010, Published online: 23 Aug 2010
 

Abstract

Monte Carlo (MC) simulations have been used to study the low-energy channeling of 10B and 11B ions along the [100] axis in Si crystal. MC simulations show that the critical angle ΨC ≈ 15.3(keV/E)1/2 (in degrees) for the channeling of isotopic 10B ions and ΨC=14.5(keV/E)1/2 (in degrees) for the channeling of isotopic 11B ions, where E is the incident energy. This means that (ΨC for 10B ionsC for 11B ions)≈ (15.3/14.5)≈ (11/10)1/2.

Acknowledgements

This study was supported by the Knowledge Innovation Project of Chinese Academy of Sciences under grant no. KJCX2-SW-N10 and by the National Basic Research Program of China (973 Program) 2010CB832903.

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