The recovery effects of electron beam pulse treatment in Sn implanted Ge

ABSTRACT

The paper describes the recovery effects of pulsed electron beam treatment in Ge single crystals implanted with various doses of Sn ions at room and low temperatures. A protective coat of 100 nm Sn was applied as a sacrificial layer. The implanted layers were studied by RBS/cRBS (Rutherford BackScattering Spectrometry/channelled Rutherford BackScattering Spectrometry) method, SIMS (Secondary Ion Mass Spectrometry) and TEM (Transmission Electron Microscopy). Defects revealed in channelled RBS spectra were analysed by McChasy code. The results show that the Sn concentration attains 1% and more with very good substitutionality. They also reveal excellent lattice recovery after e-beam melting. Suggestions are derived as regards further improvement of pulsed e-beam technique.

KEYWORDS:

• Ge single crystals
• Sn implantation
• pulsed e-beam treatments
• RBS/cRBS study
• TEM and DLTS measurements

Acknowledgements

Parts of this research were carried out at IBC at the Helmholtz-Zentrum Dresden – Rossendorf e. V., a member of the Helmholtz Association, in the frame of the access proposals 19001817-ST and 19001818-ST as in-kind contribution. The kind assistance of Dr. Stefan Facsko (HZDR) at all stages of the Project progress is gratefully acknowledged. We would like to thank Mr. Frank Ludewig for his technical assistance.

Disclosure statement

No potential conflict of interest was reported by the author(s).

Additional information

Funding

This work was supported within an international project financed by the Polish Ministry of Science and Higher Education in2020 (referred to as PMW-Agreement 5131/HZDR/2020/0) and within a complementary PMW international project financed byAgreement 5132/HZDR/2020/0. Parts of this research were carried out at IBC at the Helmholtz-Zentrum Dresden-Rossendorf e. V., amember of the Helmholtz Association, in the frame of the access proposals 19001817-ST and 19001818-ST as in-kind contribution.Kind assistance of Dr. Stefan Facsko (HZDR) at all stages of the Project progress is gratefully acknowledged. We would like to thankMr. Frank Ludewig for technical assistance.

Notes on contributors

Zbigniew Werner

Zbigniew Werner physicist of National Centre for Nuclear Research, designing the projects, supervision of experimental and theoretical work.

Marek Barlak

Marek Barlak - material science engineer of National Centre for Nuclear Research, execution and interpretation of cRBS measurements, supervision of the projects scientific activity.

Renata Ratajaczak

Renata Ratajaczak physicist of National Centre for Nuclear Research, execution and interpretation of McChasy simulations.

Ulrich Kentsch

Ulrich Kentsch scientist of Helmholtz-Zentrum Dresden-Rossendorf, supervision of ion implantation.

René Heller

René Heller scientist of Helmholtz-Zentrum Dresden-Rossendorf, supervision of cRBS measurements and interpretation.

Frans Munnik

Frans Munnik scientist of Helmholtz-Zentrum Dresden-Rossendorf, cRBS measurements and interpretation.

Piotr Konarski

Piotr Konarski scientist of Łukasiewicz Research Network - Tele and Radio Research Institute, supervision of SIMS investigations and interpretation.

Piotr Dłużewski

Piotr Dłużewski scientist of Institute of Physics of the Polish Academy of Sciences, supervision of TEM investigations and interpretation.

Marcin Pisarek

Marcin Pisarek scientist of Institute of Physical Chemistry of the Polish Academy of Sciences, supervision of AES/XPS investigations and interpretation.

Mirosław Kozłowski

Mirosław Kozłowski scientist of Łukasiewicz Research Network - Tele and Radio Research Institute, supervision of SEM investigations and interpretation.

Joachim Ażgin

Joachim Ażgin scientist of Łukasiewicz Research Network - Tele and Radio Research Institute, SIMS investigations and interpretation.

Jerzy Zagórski

Jerzy Zagórski technician of National Centre for Nuclear Research, sample preparation, execution and supervision of sample circulation program.

Bogdan Staszkiewicz

Bogdan Staszkiewicz technician of National Centre for Nuclear Research, sample preparation, execution and supervision of sample circulation program.