Modified Sigmund sputtering theory: isotopic puzzle

Abstract

The theory of anisotropic sputtering proposed by Zhang [Z.L. Zhang, Phys. Rev. B 71 026101 (2005).] and [Z.L. Zhang and L. Zhang, Radiat. Eff. Defects Solids 159(5) 301 (2004).] has been generalized to sputtering of isotopic mixtures. The present theory (modified Sigmund theory) has been shown to fit numerous simulations and experimental measurements, including energy and angular distribution of sputtered atoms. In particular, the theory has successfully solved the isotope puzzle of sputtering induced by low energy and heavy ion bombardment.

Keywords:

• Isotopic
• Sputtering yield angular distribution
• Sputtering yield energy distribution

Acknowledgements

I would like to thank Dr. K. R. Padmanabhan, Associate Professor in the Department of Physics and Astronomy of Wayne State University in USA, without whose initial supervision (1983–1986) this work could not have been done. Special thanks are due to Dr. P. K. Kuo, Professor in the same department, for recommending me as a graduate student in the Department in 1980. I wish to thank my wife Bin Chu Zhang for her constant encouragement and much support. This work was supported in part by the Focal Point Scientific Research Fund from the Educational Bureau of Anhui Province, China, 2005, Grant no. 2005kj034ZD.