Abstract
Boron was implanted into several solids in the dose regime 1014 to 1016 ions/cm2 and at energies between some 10 keV and some MeV. Measurements of the corresponding depth distributions were performed by means of the 10B(n, α0)7Li(gnd) and 10B(n, α1)7Li∗(1st) nuclear reaction techniques with thermal neutrons, and by SIMS. The results are compared to theoretical predictions.