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Abstract
1 to 2 MeV nitrogen (N+ and N2 +) ions were implanted at high fluences in stainless steel, and their depth distributions were measured subsequently by Rutherford backscattering and thermal neutron depth profiling. The range profiles were broader than theoretically expected. With increasing fluence, deviations from ballistic computer codes increase. These deviations can well be described by the assumption of radiation enhanced diffusion for which a simple analytical model is presented. The thermal mobility shows a different behavior for low, and for high implanted fluences.