Study of ion-bombardment-induced surface topography of silver by stereophotogrammetric method

Abstract

The ion-bombardment-induced surface topography of polycrystalline silver was studied using the stereo-photogrammetric method. The samples were irradiated with 30keV argon ions at fairly high fluences (> 10¹⁷ ions/cm²). The influence of the inclination angle of the sample in the SEM on the cone shape of a SEM-picture is discussed. To analyse the irradiated surfaces covered with cones, the SEM-stereotechnique is proposed. The measurements of the sample section perpendicular to the incidence plane are also carried out.

Key Words:

• ion bombardment
• surface topography
• stereoscopic SEM
• sputtering