Nanocutting Process of CdZnTe Single Crystals

Abstract

(111), (110) Cd_0.96Zn_0.04Te, and (111) Cd_0.9Zn_0.1Te single crystals were lapped and polished by Al₂O₃ powder and SiO₂ nanosphere, respectively. The ultrasmooth and damage-free surface with Ra of 1.96 nm is achieved. The nanocutting process was conducted by a Berkovich indenter. When a cutting speed is 10 µm/s and applied load is 10 µN, the surface roughness Ra of (111) Cd_0.96Zn_0.04Te is 0.22 nm. The results show that lapping, chemical mechanical polishing, and nanocutting composite process is suitable for the machining of soft brittle materials.

Keywords:

• AFM
• Al₂O₃ powder
• Berkovich indenter
• CdZnTe
• Chemical mechanical polishing
• Cutting speed
• In-situ scanning
• Lapping
• Nanocutting
• Nanoindenter
• Nanosphere
• Polishing slurry
• SiO₂
• Soft brittle materials
• TEM

ACKNOWLEDGMENTS

The authors appreciate the financial support from the National Basic Research Program of China (Grant No. 2009CB724306), the National Natural Science Foundation of China (Grant Nos. 50805017 and 50875037), Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 200801411022), the Open Foundation of State Key Laboratory of Metastable Materials of Science and Technology of Yanshan University, and the Open Research Foundation of State Key Laboratory of Digital Manufacturing Equipment & Technology in Huazhong University of Science & Technology.