Micromirror actuated by PZT film for optical application

Abstract

We demonstrate the design and fabrication of a micromirror actuated by PZT film for optical applications such as optical scanner and optical cross-connect switch. The micromirror is connected to four PZT cantilever through hinge structure and is tilted with two rotation directions by actuating the four PZT cantilevers. In the actuated micromirror, bending of the PZT cantilevers due to residual stress does not cause the tilting of the micromirror. The surface roughness of the micromirror is greatly improved using new etching method and SiO₂ buffer layer. The tiling angle reaches 1.98° at applied voltage of 30 V and will be more improved through optimization of hinge structure.

Key Words:

• MEMS
• micromirror
• PZT film
• Cantilever
• sol-gel