Chemical solution processing of sr₂(nb,ta)₂o₇ thin films

Wataru Sakamoto Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusaku, Nagoya, 464-8603, JAPAN

Daisuke Kawasaki Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusaku, Nagoya, 464-8603, JAPAN

Toshinobu Yogo Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusaku, Nagoya, 464-8603, JAPAN

Shin Ichihirano Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusaku, Nagoya, 464-8603, JAPAN

Abstract

Sr₂(Nb,Ta)₂O₇ thin films have been synthesized by chemical solution deposition. Homogeneous and stable Sr₂(Nb,Ta)₂O₇ precursor solutions with various Nb/Ta ratios were prepared by controlling the reaction of metal alkoxides in ethanol with a key additive of 2-ethoxyethanol. The crystallization temperature of the perovskite-type Sr₂(Nb,Ta)₂O₇ slabs structure decreased with increasing Nb substitution in amount. The crystallization temperature of Sr₂(Nb_0.2Ta_0.8)₂O₇ films on Pt/Ti/SiO₂/Si and Pt/Ir/Ti/SiO₂/Si substrates was above 800°C. On the other hand, by using Pt(100)/MgO(100) as a substrate, Sr₂(Nb,Ta)₂O₇ thin films crystallized into the Sr₂(Nb,Ta)₂O₇ phase at 700°C.

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Chemical solution processing of sr₂(nb,ta)₂o₇ thin films

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Chemical solution processing of sr₂(nb,ta)₂o₇ thin films