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Abstract
Temperature and frequency dispersion of the dielectric constant was investigated on the ferroelectric Pb(Zr0.53 Ti0.47)TiO3[PZT] thin films, which prepared by sol-gel spin on process using 0.4 M PZT solution. The virgin PZT and fatigued PZT films exhibited a marked dielectric dispersion over the temperature range from room temperature to 300°C and over the frequency range from 10−2 Hz to 100 kHz. The dielectric relaxation was observed below 10 kHz, which was interpreted based on a dipole relaxation of the Cole-Cole type. Low-frequency dielectric relaxation is attributed to the lead and oxygen vacancies complex dipoles in PZT film. The thermal activation energy for the relaxation process of ionized space-charge carriers in the virgin and fatigued PZT film were 1.61 eV and 0.96 eV, respectively.