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Integrated Ferroelectrics
An International Journal
Volume 63, 2004 - Issue 1
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Original Articles

Harmonic Analysis of Microbeams with PZT On-Chip Actuating and Sensing

JIA ZHOU Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126
,
MARIO BAUM Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126
,
RALF SCHMIEDEL Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126
,
THOMAS GESSNER Chemnitz University of Technology, 70 Reichenhainer St., Chemnitz, Germany, 09126
,
YIPING HUANG Fudan University, 220 Handan Rd., Shanghai, China, 200433
&
GANG RUAN Fudan University, 220 Handan Rd., Shanghai, China, 200433
Pages 9-13 | Received 01 Aug 2003, Accepted 01 Jan 2004, Published online: 11 Aug 2010
 
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Abstract

Two groups of microbeams with different top electrode patterns are designed as PZT on-chip actuating and sensing devices. The results of hamonic analysis reveal that such microbeams present high Qs (>500 in air) in certain ranges of frequency, which provides the design basis for various applications.

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