Abstract
Both Nd substituted and W doped bismuth titanate thin films were deposited by chemical solution deposition (CSD) technique on the (111)Pt/Ti/SiO2/(100)Si substrates. B-site doping with W6+, enhanced the remnant polarization and improved the fatigue property. Remnant polarization of Bi3.15Nd0.85Ti2.98W0.02O12 (BNTW) is 27 μ C/cm2, which is higher than that of Bi3.15Nd0.85Ti3O12 (BNT) deposited in the same condition. Good fatigue endurance was confirmed at 1 M Hz frequency up to 1010 switching cycles in both BNTW and BNT thin films. However, at the frequency of 50 kHz, the BNTW thin films show an improved fatigue property. W-doped effect is discussed.
ACKNOWLEDGMENT
This work was supported by the National Science Foundation of China (No 90207027, 100210001), the 973 Project of MOST (2002CB613303) of China, and Jiangsu Natural Science Foundation (No. BK2002410).