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Integrated Ferroelectrics
An International Journal
Volume 65, 2004 - Issue 1
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Original Articles

Imprint Characteristics of (Bi,La)4Ti3O12-Layered Perovskite Ferroelectric Thin Films

SEAUNG-SUK LEE Flash Division and Memory R&D Div., Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eub, Ichon-si, Kyoungki-do, Korea, 467-701
&
SUK-KYOUNG HONG Flash Division and Memory R&D Div., Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eub, Ichon-si, Kyoungki-do, Korea, 467-701
Pages 141-147 | Received 01 May 2004, Accepted 01 May 2004, Published online: 11 Aug 2010
 
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Abstract

We have investigated the imprint characteristics of 100 nm thick-(Bi,La)4Ti3O12, BLT, films prepared both using metal-organic decomposition (MOD) and Sol-Gel spin coating process after the storage for 2 hours to 96 hours at high temperatures of 85°C, 125°C, 150°C, and 175°C, respectively. Reading and writing operation were performed at 25°C and 90°C, respectively. From the results, It was revealed that the imprint characteristics of MOD-BLT and Sol-Gel BLT are almost similar properties.

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