ENHANCEMENT ON CRYSTALLIZATION KINETICS OF Pb(Zr_{1 - x}Ti_x)O₃ THIN FILMS PREPARED BY METAL-ORGANIC DECOMPOSITION PROCESS BY THE INCORPORATION OF NANO-POWDERS

ABSTRACT

Incorporation of nano-sized PZT powders (∼40 nm) into the Pb-Zr-Ti carboxylates was observed to pronouncedly enhance the kinetics of crystallization for the amorphous PZT films, which, in turn, improves the stability of the films. Lowest post-annealing temperature necessary to form the perovskite phase decreases from 600°C for powder-less PZT films to 550°C for nano-PZT incorporated films. Highest post-annealing temperature tolerable by the PZT films increases from 700°C for powder-less films to 750°C for the nano-PZT incorporated ones. The best ferroelectric properties achievable for nano-PZT incorporated films post-annealed at 750°C (1 h) are (P_r)₇₅₀ = 23 μC/cm² and (E_c)₇₅₀ = 42.5 kV/cm, which are superior to those for powder-less PZT films post-annealed at 700°C for 1 h ((P_r')₇₀₀ = 20.5 μC/cm² and (E_c')₇₀₀ = 36.7 kV/cm). The probable explanation for such a phenomenon is that the presence of nano-sized PZT particulates induces uniformly heterogeneous nucleation of perovskite phase over the PZT films, resulting in instantaneous formation of perovskite phase, which is less susceptible to PbO-loss phenomenon.

ACKNOWLEDGMENT

Financial support from National Science Council, R. O. C., through the project No. NSC 93-2112-M-003-011 is gratefully appreciated by the authors.