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Integrated Ferroelectrics
An International Journal
Volume 75, 2005 - Issue 1
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SECTION E: FeRAM MATERIALS AND DEVICES

ORIENTATION AND FATIGUE IMPROVEMENT OF PZT THIN FILMS ON CUBIC TEXTURED CaRuO3 ELECTRODE

HANJONG PAIK Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
,
JONGIN HONG Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
,
YOUNG-AH JEON Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
,
SUNG KWAN KIM Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
,
YUNSEOK KIM Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
,
YOUNGHA KIM Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
,
YANG SOO KIM Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
&
KWANGSOO NO Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusung-dong, Yusung-gu, 305-701, Daejeon, Korea
 show all
Pages 115-121 | Received 17 Apr 2005, Published online: 15 Aug 2006
 
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ABSTRACT

In this study, we report on the (100) cube-textured Pb(Zr0.4,Ti0.6)O3 (PZT) thin films using a conducting perovskite CaRuO3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (Pr) and coercive field (Ec) of 25 μ C/cm2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.

ACKNOWLEDGMENTS

This work supported by the Ministry of Education (project named “Brain Korea 21”). And the authors gratefully acknowledge the experimental support by Dr. Seung-Hyun Kim, in Inostek Inc., Korea, and Heesan Kim, Ph.D. candidate the Department of Material Science & Engineering, KAIST, Korea.

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