EPITAXIALLY GROWN PbZr_0.3Ti_0.7O₃ THIN FILMS ON LaMnO₃ APPLICABLE TO NANO-STORAGE MEDIA

ABSTRACT

We have investigated structural and electrical properties of PbZr_0.3Ti_0.7O₃ (PZT) thin films deposited by pulsed laser deposition methods. PZT thin films have been deposited on LaMnO₃ (LMO) bottom electrodes with LaAlO₃ substrates during different deposition times. High-resolution x-ray diffraction data have shown that all the PZT films and bottom electrodes are highly oriented with their c-axes normal to the substrates. The thickness of each film is determined by field-emission scanning electron microscope. We have also observed root mean square roughness of 1 to 10 Å by using atomic force microscopy mode, and local polarization distribution and retention behavior of a ferroelectric domains by using piezoelectric force microscopy mode. A PZT/LMO structure has shown good ferroelectric and retention properties as a media for the nano-storage devices.

Keywords:

• PbZr_0.3Ti_0.7O₃
• LaMnO₃
• highly-oriented
• piezoelectric force microscopy
• retention

ACKNOWLEDGMENTS

This work was supported by National R&D Project for Nano Science and Technology (Project M1-0212-29-0000) of MOST, National Research Program for the 0.1 Terabit Non-Volatile Memory Development Sponsored by Korea Ministry of Science and Technology, and a grant from Center for Applied Superconductivity Technology of then 21st Century Frontier R&D Program funded by the Ministry of Science and Technology, Republic of Korea.