ABSTRACT
Structural distortion of ferroelectric thin films caused by film strain has a strong impact on the microwave dielectric properties. SrTiO3 thin films epitaxially grown on (110) DyScO3 substrates using molecular beam epitaxy (MBE) are extremely strained (i.e., ∼ 1% in-plnae tensional strain) from 3.905 Å of bulk SrTiO3. The room temperature dielectric constant and its tuning of the films are observed to be 6000 and 75% with an electric field of 1 V/μ m, respectively. The control of strain in SrTiO3 provides a basis for room temperature tunable microwave applications by elevating its phase transition peak to room temperature. Also, a significant in-plane anisotropy in dielectric constant and tuning was observed in these SrTiO3 films. The observed in-plane anisotropic dielectric properties have been interpreted based on the phenomenological thermodynamics of film strain.
ACKNOWLEDGMENTS
The authors gratefully acknowledge Jeffrey H. Haeni and Darrell G. Schlom at Pennsylvania State University for providing the SrTiO3 film samples.