Comparison of In-Plane Actuation from a Thin Film and a Bulk Actuators

ABSTRACT

This contribution reports the results of a comparative method on the properties of the in-plane actuation of lead zirconate titanate thin films. Our aim is to dynamically measure the force generated by a thin film on its substrate in order to evaluate their potential for plate wave generation. As there is a difficulty to obtain a quantitative measure, we used a comparaison with a thin bulk disk having same diameter. It is then shown that thin film above 2 μ m can provide the same amount of mechanical output than bulk disk under the same voltage.

Keywords::

• Plate wave
• triangulation
• PZT film
• bilayer