Piezoelectric Actuation and Micro-Domain Behaviors in the Monolithically Patterned PMN-PT Single Crystal

Abstract

Piezoelectric actuation and micro-domain behavior in phase grating modulators fabricated monolithically on domain-engineered 0.67PMN-0.33PT single crystals were investigated. Some irregular strain behaviors caused by micro-domain formation in the substrate crystal were observed in the PMN-PT substrate. Real actuation and micro-domain formation were topologically analyzed and many small steps looked like mountains due to micro-domain formation could be observed along the actuated device regions. These micro-domain formations were observed under various operating conditions and compared to one another. A formation mechanism of micro-domain based on a constraint model was considered.

Keywords:

• PMN-PT
• micro-domain
• remnant strain
• surface topology
• optical modulator

ACKNOWLEDGEMENT

This research was supported by Samsung Electro-Mechanics Co., Ltd., Korea under Grant No. UTD 6-39340. The authors would like to thank to Nano-Or Technologies for helping Nan-Or 3DScope2000 analysis.