Determination by Indentation Method of Sputtered PZT Films Mechanical Parameters for Si-MEMs Applications

ABSTRACT

This paper presents our investigation in characterization of mechanical parameters of PZT thin films. In the present study, we aim at measuring the transverse biaxial elastic modulus and the hardness of these piezoelectric ceramic films using nanoindentation technique. First were these measurements necessary for checking the mechanical quality of our films. But we could demonstrate the possibility of this technique to measure the true biaxial elastic modulus. This was shown to be close to hard bulk PZT ceramics for the case of our sputtered films. Moreover, this comparatively simple technique gives insight in the mechanical properties of ferroelectric films having various grain size.

Keywords:

• Nanoindentation
• PZT film
• elastic modulus
• hardness
• MEMS