SYNTHESIS AND CHARACTERIZATION OF LEAD STRONTIUM TITANATE THIN FILMS BY CHEMICAL SOLUTION TECHNIQUE

ABSTRACT

Lead strontium titanate (Pb_xSr_1−xTiO₃) thin films were fabricated by chemical solution deposition technique and characterized for their phase purity, surface morphology, and dielectric properties. Thin films of Pb_0.3Sr_0.7TiO₃ (PST30) and Pb_0.4Sr_0.6TiO₃ (PST40) are studied and presented here. Films of both compositions were cubic at room temperature. Effects of substrate, annealing temperature and composition on the dielectric properties of the films were studied. Tuanbility of the PST30 and PST40 films on Pt substrate were 79% and 87%, respectively at room temperature. Further, low dielectric losses, low leakage currents, and nearly constant tunability values for a range of temperature (150–300 K) make these films very attractive for tunable devices.

Keywords:

• PST thin films
• chemical solution
• thin films
• dielectric and leakage current

ACKNOWLEDGMENTS

This work was supported in parts by NAGT-40091, NCC5-518, NSF INT97018, and DARPA-FAME grants.