Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 82, 2006 - Issue 1
Submit an article Journal homepage
46
Views
3
CrossRef citations to date
0
Altmetric
Original Articles

EFFECTS OF SUBSTRATE TEMPERATURE AND TARGET-SUBSTRATE DISTANCE ON THE DIELECTRIC NON-LINEARITY OF Ba0.6Sr0.4TiO3 THIN FILM

HONGWEI CHEN School of Microelectronics & Solid State Electronics, University of Electronic Science & Technology of China, Chengdu, 610054, P. R. China
,
CHUANREN YANG School of Microelectronics & Solid State Electronics, University of Electronic Science & Technology of China, Chengdu, 610054, P. R. China
,
CHUNLIN FU School of Microelectronics & Solid State Electronics, University of Electronic Science & Technology of China, Chengdu, 610054, P. R. China
,
SHUCHENG FENG School of Microelectronics & Solid State Electronics, University of Electronic Science & Technology of China, Chengdu, 610054, P. R. China
&
YAFANG PEI School of Microelectronics & Solid State Electronics, University of Electronic Science & Technology of China, Chengdu, 610054, P. R. China
Pages 101-108 | Received 23 Aug 2005, Published online: 23 Nov 2006
 
Sample our Physical Sciences journals, sign in here to start your FREE access for 14 days

ABSTRACT

Barium strontium titanate (Ba0.6Sr0.4TiO3, short for BST) thin films were prepared by RF-magnetron sputtering. The influences of deposition conditions, such as substrate temperature and target-substrate distance, on the microstructures and non-linearities of BST thin films were investigated. The non-linearities of Ba0.6Sr0.4TiO3 thin films increase as the substrate temperature increases and/or target-substrate distance decreases.

Log in via your institution

Access through your institution

Log in to Taylor & Francis Online

Restore content access

Restore content access for purchases made as guest
Purchase options * Save for later

PDF download + Online access

  • 48 hours access to article PDF & online version
  • Article PDF can be downloaded
  • Article PDF can be printed
USD 61.00 Add to cart

Issue Purchase

  • 30 days online access to complete issue
  • Article PDFs can be downloaded
  • Article PDFs can be printed
USD 2,157.00 Add to cart

* Local tax will be added as applicable

Related Research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.