ABSTRACT
Imprint and fatigue properties of Pb(Zr0.4Ti0.6)O3film prepared by sol-gel spin coating method in Pt/PZT/Pt capacitors are studied in this experiment. The voltage shift of hysteresis loops of Pt/PZT/Pt capacitors under DC voltage bias and fatigue stress are investigated at room temperature. It is shown that the absolute values of voltage shift of hysteresis loops decrease with the increasing positive bias voltage. Both the absolute and relative shifts of coercive voltage increase with the increase of fatigue stress. The properties above can be explained by the formation and change of oxide layer at PZT/electrode interface under fatigue stress and correlative theories and models.
ACKNOWLEDGMENTS
This work is supported by National Natural Science Foundation of China (90407023), and “863” Program of China (2004AA404240). The authors would like to thank Mr. Liu Hua-rui and Mr. Li Wei, for their help and discussion in this experiment. The authors would like to thank Ms Lue Feng for her help at figure processing, especially.