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Integrated Ferroelectrics
An International Journal
Volume 85, 2006 - Issue 1
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SECTION C: FeRAM MATERIALS: MATERIALS CHARACTERIZATION

EFFECTS OF PVA ADDING ON THE MICROSTRUCTURE AND COMPOSITION OF SOL-GEL DERIVED PZT FILMS

TIEN-I CHANG Department of Materials Science and Engineering, National Cheng Kung University, No. 1 University Road, Tainan, 701, Taiwan
,
SHENG-CHANG WANG Department of Mechanical Engineering, Southern Taiwan University of Technology, No. 1, Nan-Tai St., Yung-Kang City, Tainan County 710, Taiwan
,
CHEN-FU LIN Department of Materials Science and Engineering, National Cheng Kung University, No. 1 University Road, Tainan, 701, Taiwan
&
JOW-LAY HUANG Department of Materials Science and Engineering, National Cheng Kung University, No. 1 University Road, Tainan, 701, Taiwan
Pages 129-138 | Received 31 May 2006, Published online: 14 Feb 2007
 
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ABSTRACT

Lead zirconate titanate (PZT, 53/47) films were successfully fabricated on multi-layers substrate (Pt/Ti/SiO2/Si) by the spin-coating via sol-gel process. A special core-shell structure was formed in the films by the adding of PVA polymer. XRD results showed that PZT films transform to pure perovskite phase entirely after annealing at 700°C for 90 min. By EPMA analysis, the composition of PZT thin film derived by this procedure was located at the morphotrophic phase boundary (MPB) region. Furthermore, the composition variations in the core-shell structure were identified by the backscattering electron image (BEI) analysis. With this innovative procedure, crack-free PZT films were successfully obtained.

ACKNOWLEDGMENT

The authors would like to thank the National Science Council of Taiwan, Republic of China, for its financial support under Contract No. NSC 91-2216-E006-042.

Notes

*All is analyzed by EPMA-WDS.

**V3 and V4 are denoted as the weight percentages [PVA/ (PZT + PVA) *100%] of 25 wt% and 20 wt%, respectively.

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