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Integrated Ferroelectrics
An International Journal
Volume 95, 2007 - Issue 1
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SESSION F: MEMS, NEMS, PURPELECTRIC/IR, OPTOELECTRONIC MATERIALS

INTEGRATED INFRARED DETECTORS BASED ON (Ba0.65Sr0.35)TiO3 THIN FILMS

CH. G. WU State Key Lab of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, North Jianshe Road, Chengdu, 610054, China
,
W. L. ZHANG State Key Lab of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, North Jianshe Road, Chengdu, 610054, China
,
Y. R. LI State Key Lab of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, North Jianshe Road, Chengdu, 610054, China
,
X. ZH. LIU State Key Lab of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, North Jianshe Road, Chengdu, 610054, China
,
J. ZHU State Key Lab of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, North Jianshe Road, Chengdu, 610054, China
&
B. W. TAO State Key Lab of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, North Jianshe Road, Chengdu, 610054, China
Pages 26-34 | Received 15 Jun 2007, Accepted 30 Sep 2007, Published online: 20 Sep 2010
 
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ABSTRACT

The integrated single element infrared detectors were developed for high-loading smart munition application using (Ba0.65Sr0.35)TiO3 (BST) pyroelectric films and SiO2 thermal insulating layer. (Ba,Sr)RuO3 (BSR) seeding-layer was deposited on the Pt/Ti/SiO2/Si to induce BST films c-axis preferred orientation growth. The capacitance dependant with temperature of BST films were measured at the temperature ranging from 230 K to 340 K, releasing that the temperature coefficient of capacitance was 1.6%/K. The pyroelectric coefficient of BST films was 7.45 × 10− 7 C/K cm2 measured by dynamic method. Infrared response evaluation of the fabricated sensor has been carried out with D* of 6.34 × 107 cm Hz1/2/W indicating that the integrated infrared detectors have potential application as gun-launched smart munition seeker.

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