ABSTRACT
The multilayer ring type piezoelectric vibrator was manufactured using low temperature sintering Pb(Mn1/3Nb2/3)O3-Pb(Ni1/3Nb2/3)O3-Pb(Zr0.50Ti0.50)O3 (abbreviate ed as PMN-PNN-PZT) piezoelectric ceramic added Na2CO3 and Li2CO3 as sintering aids. And then, ultrasonic nozzle was fabricated using the vibrator. The driving current and driving power of the ultrasonic nozzle showed the stable values as 260 mA and 8.1W after 10 min operation. No problems were occurred even under long time operation because the surface temperature of the ceramic actuator kept the maximum value of 26°C in the experiment.
ACKNOWLEDGEMENT
This work was supported by grant No. (R01-2006-000-10120-0) from the Basic Research Program Korea Science and Engineering Foundation of Ministry of Science & Technology.