ABSTRACT
A microelectromechanical systems-based handwriting system device was designed. We proposed an ominidirectional acoustical sensor microarray which can offer isotropic directional sensitivity with a high radiation acoustic power when it as a transmitter and a high array spatial gain (AG) when it as a receiver. It has been designed for use in the novel handwriting recognition system to attain a large writeable scale and to write in any direction. The proposed array device based on novel ferroelectric thin film has excellent performance, miniature size and high reliability, and could be fabricated with conventional integrated circuit process.
ACKNOWLEDGMENTS
This work is supported by National Natural Science Foundation of China (90407023), and the China national “863” Program (2006AA04Z872).